| Type | Vacuum operation vacuum valves |
|---|---|
| Application | Single Item Operating |
| Installation method | Direct |
| Number of Ports | 3-port valve |
| Types of solenoid | Single |
| Switching Type | 2-position Normally Closed |
| Pipe Port Type | Flange |
| Flange Type | NW |
| Flange Calls | 25 |
| Seal Type | Bellows seal |
| Indicator | No indicator |
| Pilot Port Direction | Flange side |
| Temperature Range | 5 to 150°C (with heater for 120℃) |
| Switch Part Number | No auto-switch (no magnet) |
| Seal material | Kalrez (Formula No.: 4079) |
| Body Surface Treatment | External: hard anodized aluminum, Internal: base material |
| Seal Change Location | Valve seal 1 / valve seal 2 / external seal |
