| Type | Vacuum operation vacuum valves |
|---|---|
| Application | Single Item Operating |
| Installation method | Direct |
| Number of Ports | 3-port valve |
| Types of solenoid | Single |
| Switching Type | 2-position Normally Closed |
| Pipe Port Type | Flange |
| Flange Type | NW |
| Flange Calls | 50 |
| Seal Type | Bellows seal |
| Indicator | With indicator |
| Pilot Port Direction | Flange side |
| Temperature Range | 5 to 60℃ (no heater) |
| Switch Part Number | M9P |
| Number of Switches | 1 pc. (Detection position: valve closed) |
| Seal material | FKM (Formula No.: 1349-80) |
| Body Surface Treatment | External: hard anodized aluminum, Internal: base material |
| Seal Change Location | None |
| Length of Lead Wire for Switch | 0.5 |
